| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable respective cameras 91, 92 to execute efficient recognition operation of marks FM1, FM2 on a base by efficiently executing recognition operation of a plurality of calibrating marks BM1 to BM3. <P>SOLUTION: One camera 91 out of a plurality of cameras attached to a unit 6 is moved to recognizable positions of respective calibrating marks BM1 to BM3 to recognize the plurality of calibrating marks BM1 to BM3. Thermal deformation information concerned with thermal deformation of a drive mechanism 7 is found out by using the calibrating mark recognition results. By calibrating the drive of the unit 6 based on the thermal deformation information, the camera 91 is moved to positions on which the marks FM1, FM2 put on the base 3 on a base board 11 can be recognized to recognize the marks FM1, FM2 on the base. By calibrating the drive of the drive mechanism 7 based on the relative position information of the plurality of cameras and the thermal deformation information, a camera 92 other than the camera 91 is moved to positions on which the marks FM1, FM2 on the base can be recognized to recognize the marks FM1, FM2 on the base. <P>COPYRIGHT: (C)2010,JPO&INPIT |
