| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a process control device and method that is robust against disturbance and reduces maintenance frequency more than heretofore. <P>SOLUTION: A determination part read out device data generated from a sensor included in a process apparatus and determines whether the process apparatus an ordinary state. When the determination part determines that the process apparatus is the ordinary state, a correction value calculation part calculates a recipe correction value by using measurement data generated from a measurement instrument arranged behind the process apparatus and the apparatus data. Then, a recipe correction part corrects a recipe to be supplied to the process apparatus based on the correction value output from the correction value calculation part and transmits the corrected recipe to the process apparatus. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
