| 摘要 |
PROBLEM TO BE SOLVED: To provide a baseboard inspection device capable of rapid and accurate inspection, and to provide a rail width changing method for a baseboard fixing rails of the baseboard inspection device. SOLUTION: The baseboard inspection device includes: baseboard fixing rails 12, 16 arranged to widen or narrow the width between the rails for transporting an inspecting baseboard B, and to fix the position of the inspecting baseboard B; and two or more inspection heads 22, 26 arranged on one surface of the inspecting baseboard B. The inspection heads 22, 26 includes head bodies 23, 27 movably arranged in parallel along the planer direction of the inspecting baseboard B; and contact probes 24, 28 movably arranged, in a direction of crossing the movement direction of the head bodies 23, 27. The inspection heads 22, 26 are arranged to set fixed positions for making the probes retract during a non-inspection period and inspection positions, in an inspection which lies in the same surface as a fixing surface of the inspecting baseboard B in the inspection, to reduce the movement stroke of the contact probes 24, 28 in the inspection. COPYRIGHT: (C)2010,JPO&INPIT
|
