发明名称 IMPEDANCE MEASURING TECHNIQUE AND APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To be capable of implementing high-precision measurement by making configuration of an impedance measuring circuit to be simple and hard to noise generation. Ž<P>SOLUTION: A traveling wave of measuring signal is forced to enter to a measured object through transmission line from a signal source (Step S1). The current of the traveling wave is detected (Step S2). The synthetic voltage of voltage of the traveling wave and voltage of the reflected wave from the measured object is detected (Step S3). The electric current value I<SB>f</SB>of the traveling wave acquired at Step S2 and synthetic voltage value V acquired at Step S3 are used to determine impedance Z of the measured object (Step S4). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009294173(A) 申请公布日期 2009.12.17
申请号 JP20080150574 申请日期 2008.06.09
申请人 ADTEC PLASMA TECHNOLOGY CO LTD 发明人 FUJIWARA SHOJI;IMAI KOSUKE
分类号 G01R27/02 主分类号 G01R27/02
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