| 摘要 |
A heater of a thermal inkjet printhead. The heater is formed of tantalum aluminum oxynitride (Ta-Al-ON), wherein the tantalum aluminum oxynitride is formed of about 30 to about 60 atomic % tantalum, about 10 to about 30 atomic % aluminum, about 5 to about 30 atomic % oxygen, and about 5 to about 30 atomic % nitrogen.
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