| 摘要 |
PROBLEM TO BE SOLVED: To provide a cross-section observation scanning electron microscope for allowing the bright view of an observed cross section. SOLUTION: The cross-section observation scanning electron microscope comprises a first signal detector 104 arranged at a position near an observed specimen 103 and detecting a secondary electron signal or a reflected electron signal, a first image memory 114 for storing the output of the first signal detector 104, a second signal detector 105 arranged on the upper part of the observed specimen 103 and detecting a secondary electron signal or a reflected electron signal, a second image memory 124 for storing the output of the second signal detector 105, and an image operation device 121 for receiving the output of the first image memory 114 and the output of the second image memory 124, and masking one of images and giving logical operation to a masked image and a non-masked image to obtain such an image that the image of the cross section of the specimen is emphasized. COPYRIGHT: (C)2010,JPO&INPIT |
