| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical nanoimprinting apparatus which improves productivity of optical nanoimprint using a roller mold made of a curved tabular mold and reduces unshaped portions between concavo-convex patterns arising from a mold fixing method. SOLUTION: The apparatus is provided with a roller mold 13 and an ultraviolet lamp 15, wherein the roller mold 13 is equipped with a rotatable cylinder 14 and plate molds 13a, 13b, 13c for shaping a fine uneven pattern arranged on periphery of the cylinder 14: provided that the plate molds 13a, 13b, 13c have a certain width extending circumferentially along the cylinder 14 and curved into a circular arc with a diameter corresponding to the cylinder periphery and a length extending in the direction parallel to the shaft of cylinder 14; that engaging members 13g, 13h, 13i projecting radially along the cylinder 14 are prepared extending in length direction of the plate molds on one end in width direction of the plate molds 13a, 13b, 13c; and that each plate mold is loaded to the cylinder by engaging the engaging part of each plate mold to each engaging groove 14a, 14b, 14c arranged on the cylinder 14. COPYRIGHT: (C)2010,JPO&INPIT |
