| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute ball mounting apparatus which straightens the warp of a substrate by pressing the substrate between a placing stage and a ball cup. SOLUTION: The minute ball mounting apparatus includes the placing stage for the substrate, an arrangement mask having a plurality of through-holes formed therein, the ball cup having a ball storage part having a bottom opened, and a cup moving means and drops minute balls into the through-holes of the arrangement mask by moving the ball cup, wherein many minute balls are stored, along a top surface of the arrangement mask to mount the minute balls on the substrate. This apparatus employs means of: elevating the stage and the ball cup relatively; moving upward/downward the ball cup and the stage relatively by the elevating means so as to bring them closer to each other; and pressing the substrate between the ball cup and the stage through the arrangement mask by the upward/downward movement to straighten the warp of the substrate. COPYRIGHT: (C)2010,JPO&INPIT
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