| 摘要 |
PROBLEM TO BE SOLVED: To provide a hybrid phase plate for use in a TEM. SOLUTION: The phase plate resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result, the phase plate resembles the Boersch phase plate for electrons scattered to such an extent that they pass outside a central structure 15 and resembles the Zernike phase plate for scattered electrons passing through a bore of the central structure. Comparing the phase plate with the Zernike phase plate, it has an advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in higher resolution performance of the TEM. Comparing the phase plate with the Boersch phase plate, demands for miniaturization of the central structure are less severe. COPYRIGHT: (C)2010,JPO&INPIT
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