| 摘要 |
A method for producing a micromechanical component for controlling a fluid flow and a component produced according to this method are described. The method for producing a micromechanical component for controlling a fluid flow includes: producing an oscillatory diaphragm on a surface of a substrate by forming an underlying cavity from the same side of the surface, covering the substrate with an intermediate layer, patterning the intermediate layer, and covering the intermediate layer with a covering layer sealing the micromechanical component. It is characterized by the fact that the intermediate layer is patterned in such a way that a sealing element of a fluid valve forms on the diaphragm, which element seals and/or surrounds a valve opening formed in the covering layer.
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