THIN FILM PHOTOELECTRIC CONVERSION DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

Provided is a thin film photoelectric conversion device wherein a first electrode layer composed of a transparent conductive material, a photoelectric conversion layer which performs photoelectric conversion, and a second electrode layer composed of a conductive material which reflects light, are laminated in this order on an insulating light transmitting substrate.  The device is provided with a plurality of photoelectric conversion cells, which are formed by separating each of the photoelectric conversion layer and the second electrode layer by cell as islands by an isolating trench, and the photoelectric conversion cells adjacent to each other with the isolating trench therebetween are electrically connected in series.  The photoelectric conversion layer has a first semiconductor layer, including a fine crystal structure; and a second semiconductor layer, which includes an amorphous structure arranged to cover the side wall sections on the all sides of the first semiconductor layer in an in-plane direction of the insulating light transmitting substrate.