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发明名称
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT
摘要
申请公布号
JPH01220826(A)
申请公布日期
1989.09.04
申请号
JP19880047700
申请日期
1988.02.29
申请人
TOKYO ELECTRON LTD
发明人
MORIYAMA MASASHI
分类号
B05C11/08;G03F7/16;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
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