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发明名称
INSPECTION EQUIPMENT FOR SEMICONDUCTOR STORAGE CIRCUIT DEVICE
摘要
申请公布号
JPH01221685(A)
申请公布日期
1989.09.05
申请号
JP19880048311
申请日期
1988.02.29
申请人
NEC CORP
发明人
URABE MAKOTO
分类号
G01R31/26;G01R31/28;G11C29/10
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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