VACUUM SYSTEM OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A vacuum system of semiconductor manufacturing equipment is provided to check leakage at all area of a vacuum line by installing a plurality of vacuum sensors on the whole of vacuum line. CONSTITUTION: In a vacuum system of semiconductor manufacturing equipment, a vacuum chamber(10) for various process is prepared. A vacuum pump(11) for making a vacuum state is prepared, and the vacuum opening/closing device(13) connects and blocks a vacuum pipe(12) interlinking the vacuum chamber and the vacuum pump. A vacuum sensor(14) is installed at the one side of the vacuum chamber. A controller(15) receives a signal of a vacuum sensor controls the vacuum opening/closing device, and the sensor is respectively installed on the vacuum opening/closing device and the vacuum pipe.