发明名称 MASK SUPPORT, MASK ASSEMBLY, AND ASSEMBLY COMPRISING A MASK SUPPORT AND A MASK
摘要 <p>A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90 ° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.</p>
申请公布号 EP2133444(A1) 申请公布日期 2009.12.16
申请号 EP20080165683 申请日期 2008.04.18
申请人 APPLIED MATERIALS, INC. 发明人 LANDGRAF, HEIKE;SCHUESSLER, UWE;BANGERT, STEFAN
分类号 C23C14/04;C23C14/12 主分类号 C23C14/04
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