| 摘要 |
PURPOSE: A slit-door valve of semiconductor manufacturing equipment is provided to maximize the operation efficiency of the apparatus by applying an actuator of a dual seal cylinder and increasing a lifetime. CONSTITUTION: In a slit-door valve of semiconductor manufacturing equipment, an actuator is built in a valve body. A driving part(12) and a shaft are interlinked with the actuator to move a slit door. A driving rack gear(18) is connected with a rod(16) of an actuator, and they are operated with together. A fixing rack gear(20) is fixed on a valve body and guides the driving rack gear through the pinion gear(19). The link member is connected between the pinion gear and the shaft and moves the shaft. The guide is formed with a ball bush made of an SUS material.
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