VISION INSPECTION DEVICE FOR SEMICONDUCTOR PRODUCTION

摘要

PURPOSE: A vision device of a semiconductor manufacturing apparatus is provided to simultaneously perform a surface test and a lateral test at an identical position by compensating working distance through a medium attached to a prism. CONSTITUTION: A semiconductor device(15) is picked up by a picker(13). A camera(12) is arranged at a lower part of a vision test region(10). A prism(11) refracting a light for a lateral test is arranged within the vision test region. A vision light(14) is installed in the vicinity of the vision test region in order to obtain sufficient illuminance. The prism is arranged at forward-backward position and right-left position on the basis of a central portion of the vision test region. A medium having a refractive index larger than the air is attached on an optical path and thus working distance is compensated. The medium induces refraction of the light. The medium is attached to a lower portion of the prism.