VISION INSPECTION DEVICE FOR SEMICONDUCTOR PACKAGE MANUFACTURING MACHINE

摘要

PURPOSE: A vision testing device for a semiconductor package manufacturing apparatus is provided to suppress image blur, spread or distortion due to scattered reflection by eliminating residue water drops on a table toward the outside of an imaging region of a vision camera. CONSTITUTION: A vision camera(10) is installed on a table so as to be relatively movable. The vision camera takes a photograph of a semiconductor package(P) settled on a table(T). An illumination module(20) is installed at a lower part of the vision camera. The illumination module illuminates a light toward the semiconductor package. The illumination module sprays air provided from outside toward the semiconductor package. Air supply unit supplies air to the illumination module. The illumination module includes an illumination cover(21), an illumination board(22) and a light source(23).