| 摘要 |
<p>PURPOSE: A light irradiation device is provided to form a protrusion at the end of a discharge lamp by turning on a discharge lamp sealed with Hg and halogen by an AC current. CONSTITUTION: In a device, an optical source unit(10) is comprised of a plurality of light-generating units(N). Each light-generating unit is supported by a common supporter(3). Each light-generating unit includes a lamp(1) and a reflective mirror(2). Supporter has a slow curved surface shape along paraboloid and ellipsoid. The light emitting from each light-generating unit is overlapped with the entrance surface. An integrator is an optical element which uniformly forms illuminance distribution. The light from the integrator is parallel with the collimator(21). A parallel light is projected on a work on the work stage through a mask supported by the mask stage unit(22). A feeder(30) is connected to the light-generating unit.</p> |
