| 摘要 |
<p>PURPOSE: A method and an apparatus for transferring substrates, and equipment for processing the substrate having the apparatus are provided to minimize bending of a substrate by transferring a substrate around a shaft shorter than the width of the substrate. CONSTITUTION: In a device, a substrate transfer device includes a driving part(220) for rotating a shafts of a group and shafts of the group. The shafts of the group includes at least one first shaft(212), a second shaft(214) shorter than the first shaft, and a third shaft(216) shorter than the first length. The second shafts are located on the same plane of at least one of the first shaft. The third shafts are located on the same plane of at least first shaft. The second shafts are nearly located than the other end of at least first shaft. Third shafts are nearly located than the other end of at least first shaft.</p> |
