| 发明名称 |
Method to print photoresist lines with negative sidewalls |
| 摘要 |
A write pole for vertical magnetic recording is described. It includes a trapezoidal prism of high magnetic moment material, having inwardly sloping sidewalls. Its parallel surfaces are between about 0.1 and 0.3 microns apart and the sidewalls slope in the range of 15.5 to 60 degrees relative to vertical.
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| 申请公布号 |
US7633712(B2) |
申请公布日期 |
2009.12.15 |
| 申请号 |
US20080082256 |
申请日期 |
2008.04.10 |
| 申请人 |
HEADWAY TECHNOLOGIES, INC. |
发明人 |
CHEN CHAO-PENG;CHANG JEI-WEI;YANG XIAOHONG |
| 分类号 |
G11B5/147;G03C5/00;G03F7/00;G03F7/20;G03F7/38;G03F7/40 |
主分类号 |
G11B5/147 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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