发明名称 Mask
摘要 A mask is described for forming an image on a substrate. The mask may be selectively applied to a radiant energy sensitive material on the substrate. Actinic radiation applied to the composite chemically changes portions of the radiant energy sensitive material not covered by the mask. The mask and portions of the radiant energy sensitive material are removed using a suitable aqueous base developer. The mask is composed of aqueous base soluble or dispersible polymers and light-blocking agents.
申请公布号 US7632621(B2) 申请公布日期 2009.12.15
申请号 US20040020871 申请日期 2004.12.23
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 ANZURES EDGARDO;BARR ROBERT K.;SUTTER THOMAS C.
分类号 B41J2/01;G03F7/00;C08L101/00;C09D11/00;C09D11/10;G03C1/492;G03F1/00;G03F7/004 主分类号 B41J2/01
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