发明名称 |
Gas providing member and processing device |
摘要 |
A gas providing member includes a body portion which forms a gas providing passage between the body portion and a processing member which holds the processing target, and the gas providing passage provides gas onto a processing target. In the body portion, a gas reservoir portion located in the gas providing passage is formed.
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申请公布号 |
US7632356(B2) |
申请公布日期 |
2009.12.15 |
申请号 |
US20060374529 |
申请日期 |
2006.03.13 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
TOMITA YASUMITSU;UNNO YUTAKA |
分类号 |
C23C16/455;C23C16/458;H01L21/306 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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