摘要 |
A sheet-like substrate (34) is coated with at least one thin film (36') composed of at least one porous ceramic layer (S'1, S'2, S'3, . . . ). A solution or a suspension of an organic and/or inorganic metal composite as starting material (14) is admixed with a mixed-in, insoluble pore former (18) and the mixture (22) is sprayed on as layer (S'1, S'2, S'3, . . . ) of a thin film (36). The pore former (18) is at least partly thermally decomposed and/or burnt out to form an at least partly open-pored structure. The process is particularly suitable for producing miniaturized devices such as fuel cells and gas sensors. |