DECOUPLED, MULTIPLE STAGE POSITIONING SYSTEM

摘要

A split axis stage architecture is implemented as a multiple stage positioning system (10) that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate (12) in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly (30) is housed in a rigid air bearing sleeve (214) that is mounted to a support structure (236, 240) above a specimen stage (26) of the multiple stage positioning system.