发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN LAMINATE, AND METHOD FOR PATTERN FORMING |
摘要 |
PURPOSE: A photosensitive resin composition, and a pattern formation method using the composition are provided to reduce the content of halogen, to improve sensitivity and resolution, and to allow it to be cured without using an antimony-based or phosphorus-based strong acid generator. CONSTITUTION: A photosensitive resin composition comprises an acrylic epoxy resin; an acrylate monomer having at least one crosslinking site; and a photopolymerization initiator. The acrylic epoxy resin has a unit derived from a monomer having a group represented by the formula 1 and a monomer having a group represented by the formula 2, wherein at least one of R1 ~ R3 is -OR4; and the rest of R1 ~ R3 and R4 are a hydrogen atom or a monovalent organic group capable of having a substituent. |
申请公布号 |
KR20090127815(A) |
申请公布日期 |
2009.12.14 |
申请号 |
KR20090050324 |
申请日期 |
2009.06.08 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SENZAKI TAKAHIRO;KATO TETSUYA |
分类号 |
G03F7/027;G03F7/028 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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