| 发明名称 |
A METHOD OF IMAGING RADIATION FROM AN OBJECT ON A DETECTION DEVICE AND AN INSPECTION DEVICE FOR INSPECTING AN OBJECT |
| 摘要 |
A method of imaging radiation from an object on a detection device. The method includes directing a beam of coherent radiation to the object, scanning the beam of radiation over an angle in or out of a plane of incidence relative to the object, and imaging scattered radiation from the object on the detection device.
|
| 申请公布号 |
KR20090127937(A) |
申请公布日期 |
2009.12.14 |
| 申请号 |
KR20097022155 |
申请日期 |
2008.03.21 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
SNEL ROBERT;BLEEKER ARNO JAN;VAN BRUG HEDSER |
| 分类号 |
G01N21/95;G01B11/30;G01N21/88;G06T7/00 |
主分类号 |
G01N21/95 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
