发明名称 METHOD OF FORMING FINE PATTERNS
摘要 PURPOSE: A method of forming fine patterns is provided to transfer a fine pattern on a flexible substrate by a roll-to-roll method, thereby easily forming a fine pattern. CONSTITUTION: A metal thin plate is attached to an elastomer plate(110) in which a fine pattern is formed. The elastomer plate is attached to a cylindrical drum to form an elastomeric stamp roll(100). Conductive ink is provided to a fine pattern. The elastomeric stamp roll is rotated to contact a substrate so that the fine pattern is transferred on the substrate. A metal thin plate is located between a drum and an elastomer.
申请公布号 KR20090127680(A) 申请公布日期 2009.12.14
申请号 KR20080053774 申请日期 2008.06.09
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 JO, JEONG DAI;YU, JONG SU;LEE, TAIK MIN;KIM, DONG SOO
分类号 H01L21/28 主分类号 H01L21/28
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