发明名称
摘要 A holding apparatus that holds an optical element above a base includes three holding units provided at different positions along an outer periphery of the optical element. Each holding unit includes a first member provided on the optical element, a second member provided on the base, a columnar third member extending in a direction perpendicular to both a tangential direction and a radial direction of the optical element, and a plate-shaped fourth member having a thickness in the radial direction of the optical element. The first member and the second member are connected to each other with the third member and the fourth member disposed therebetween.
申请公布号 KR100931561(B1) 申请公布日期 2009.12.14
申请号 KR20080020377 申请日期 2008.03.05
申请人 发明人
分类号 H01L21/027;H01L21/683 主分类号 H01L21/027
代理机构 代理人
主权项
地址