摘要 |
<P>PROBLEM TO BE SOLVED: To provide a droplet ejecting head and a droplet ejector which can easily achieve both the miniaturization of a tip size and the arrangement of nozzle holes in many lines without complicating the structure, and to provide a manufacturing method of the droplet ejecting head. Ž<P>SOLUTION: As for the droplet ejecting head 100, a part of the joint surface of a cavity substrate 3 with an electrode substrate 4 is exposed via a through-hole 44 while facing an oscillating board 32 against an individual electrode 42 through an air gap 41 caused by a glass groove 45, and an individual electrode lead 36 whose one end is connected to the surface of the individual electrode 42 and whose other end is extended from the open end of the glass groove 45 to the formation part of the through-hole 44 is formed on the joint surface of the cavity substrate 3 with the electrode substrate. Thereby, a driving signal can be applied to the individual electrode lead part 36 from the exposure surface side of the cavity substrate 3 via the through-hole 44. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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