| 摘要 |
PROBLEM TO BE SOLVED: To provide microscope including a lighting means for adjusting an irradiation area with a laser beam and keeping the uniform intensity in the irradiation area. SOLUTION: The microscope includes an optical system for changing a beam diameter and a field stop disposed at a position conjugate with a sample surface, in this order beginning from the side of the laser light source. In this microscope, the following conditional equation is satisfied: A≤D/2, where A is the diameter of the field stop, and D is a beam diameter of light incident on the field stop. COPYRIGHT: (C)2010,JPO&INPIT
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