PIEZO-ELECTRIC ELEMENT, PIEZOELECTRIC SENSOR, METHOD OF MANUFACTURING PIEZO-ELECTRIC ELEMENT, METAL FOIL ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a piezo-electric element capable of narrowing an area of a plane perpendicular to a piezo-electric sensor inserting direction. SOLUTION: The piezo-electric element 5 of a thin-film element laminated sensor 1 has a metal substrate 51 having a through-hole 8a in a surface 28a thereof, an AlN element film 52 formed over all surfaces of the substrate 51 except for at least a wall surface 18 of the through-hole 8a, and a metal foil electrode 53 with conductivity coated on the AlN element film 52. COPYRIGHT: (C)2010,JPO&INPIT