摘要 |
PROBLEM TO BE SOLVED: To control the temperature of a semiconductor device by controlling a leakage current value to be within the allowable range, using the leakage current of the semiconductor device. SOLUTION: The temperature control device which controls the temperature of a semiconductor device 1 consists of a detecting part 11, which detects the leakage current of the semiconductor device 1, and a temperature control part 12 which controls the temperature of the semiconductor device to cause the leakage current to return within the allowable range, when leakage current is off the allowable range. COPYRIGHT: (C)2010,JPO&INPIT |