发明名称 TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD
摘要 PROBLEM TO BE SOLVED: To control the temperature of a semiconductor device by controlling a leakage current value to be within the allowable range, using the leakage current of the semiconductor device. SOLUTION: The temperature control device which controls the temperature of a semiconductor device 1 consists of a detecting part 11, which detects the leakage current of the semiconductor device 1, and a temperature control part 12 which controls the temperature of the semiconductor device to cause the leakage current to return within the allowable range, when leakage current is off the allowable range. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009289997(A) 申请公布日期 2009.12.10
申请号 JP20080141249 申请日期 2008.05.29
申请人 FUJITSU LTD 发明人 SHIMIZU MASAYUKI
分类号 H01L23/38;H01L23/34;H01L35/28;H01L35/30 主分类号 H01L23/38
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