| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a washing device which has the low possibility causing failure, is inexpensive and has high uniformity of washing. Ž<P>SOLUTION: A plurality of injectors 5B, 5L, 5R, 5T can generate streams containing air bubbles BB in washing liquid 7 and are arranged around a conveyor 3 such that the streams go toward the conveyor 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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