| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement method which enables non-contact measurement of an object to be measured, having a free curved surface the sign of the radius of curvature of which reverses. SOLUTION: This measurement method for measuring the shape of the object to be measured T having the free curved surface, by utilizing interference fringes produced by the interference between reflected light of the object T and a reference spherical surface, has: a first measuring step wherein the object T is arranged in a first region 30a on the side of a light source with respect to the focus position 20 of the reference spherical surface, and interference fringes are measured; and a second measuring step wherein the object T is arranged in a second region 30b on the side opposite to the first region, with respect to the focus position 20 of the reference spherical surface, and interference fringes are measured. COPYRIGHT: (C)2010,JPO&INPIT
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