发明名称 TECHNIQUES FOR CHANGING TEMPERATURE OF A PLATEN
摘要 Techniques for changing temperature of a platen are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for changing temperature of a platen comprising a platen and one or more movable thermal pads comprising one or more thermal fluid channels to carry a thermal fluid configured to affect a temperature of the platen.
申请公布号 WO2009148819(A2) 申请公布日期 2009.12.10
申请号 WO2009US44465 申请日期 2009.05.19
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;FISH, ROGER, B.;BARSKY, SAMUEL, M.;HOLDEN, SCOTT, C.;RIAF, ARTHUR, P.;ANELLA, STEVEN, M. 发明人 FISH, ROGER, B.;BARSKY, SAMUEL, M.;HOLDEN, SCOTT, C.;RIAF, ARTHUR, P.;ANELLA, STEVEN, M.
分类号 H01L21/265 主分类号 H01L21/265
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