Vorrichtung und Verfahren zur Erzeugung inkohärenten hochintensiven Lichtes und zur Verminderung von Speckle

摘要

An apparatus (300) adapted for confocal imaging of a non-flat specimen comprising a light source (110) for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen (22), and a detector (82) adapted to receive and detect light reflected from the specimen surface. The light source comprises an optical system (74) for converting a coherent beam into a plurality of beams, each of which is modified by a moving diffuser (75) within a range of movement that is correlated to the detector's integration time.