PIEZOELECTRIC MICROBLOWER

摘要

Provided is a piezoelectric microblower which can be made compact while attaining good blower characteristics. At a part of a blower chamber (4) corresponding to the central portion of a vibration board (50), a resonance space (34) is formed by providing a partition (33) around an opening (31) and the size of the resonance space (34) is set such the drive frequency of the vibration board (50) corresponds to the Helmholtz's resonance frequency of the resonance space (34).  Between the partition (33) and the vibration board (50), a gap d is formed to prevent contact when the vibration board is displaced.  Flow rate can be increased by utilizing air resonance.