MAGNETIC RECORDING MEDIUM AND MANUFACTURING METHOD THEREOF

摘要

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for manufacturing a perpendicular magnetic recording medium with stable product quality by organizing a production apparatus to conduct stable surface working and a manufacturing method to install the surface working in-line immediately before a sputtering step. Ž<P>SOLUTION: A working apparatus 3 to simultaneously work a plurality of substrates is made to synchronize with production capacity of the following step and made in-line, in a substrate working step of the perpendicular magnetic recording medium. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž