TEST WAFER UNIT AND TEST SYSTEM

摘要

A test wafer unit for testing a plurality of semiconductor chips formed on a semiconductor wafer comprises a test wafer having a shape corresponding to that of the semiconductor wafer, and a plurality of test circuits formed on the test wafer, each being provided so as to correspond to two or more semiconductor chips to test the two or more corresponding semiconductor chips. The test wafer unit may further comprise a plurality of connecting terminals formed on the test wafer, being provided on a one-to-one basis for respective testing terminals of the plurality of semiconductor chips, and being electrically connected to the corresponding testing terminals.