| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a functional film manufacturing device and a functional film manufacturing method capable of stably manufacturing a high-grade functional film for exhibiting predetermined performance, in the functional film having an organic film mainly composed of a polymer and an inorganic film formed on this film. <P>SOLUTION: This functional film manufacturing device has a carrying means for carrying a substrate of forming the organic film on a surface of a long size base body in the longitudinal direction in a vacuum, and a film forming means for forming the inorganic film by a vacuum film forming method on a surface of the organic film of the substrate carried in the longitudinal direction by this carrying means. The carrying means has a roller for contacting with the surface of the organic film, and carries the substrate in the longitudinal direction in a range of 10-200 gf/cm<SP>2</SP>in bearing pressure of a contact area where the roller contacts with the surface of the organic film. <P>COPYRIGHT: (C)2010,JPO&INPIT |
