发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND THE SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a means for easily improving an adhesion strength of wire bonding or bump connection after a probe inspection step to reduce failures in connection, so as to improve reliability. <P>SOLUTION: Before a wire bonding ball or a bump is formed, a probing chip flattening probe 5b is brought into contact so that the probe slides reversely to a sliding direction of a measuring probe and through a probe trace terminal point of the measuring probe. Thus, probing chips 3a and 3b generated during a probe inspection step can be flattened. Since the adhesion strength of the wire bonding ball or the bump is improved as a result, failures in connection can be easily reduced and reliability can be improved. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009289767(A) 申请公布日期 2009.12.10
申请号 JP20080137347 申请日期 2008.05.27
申请人 PANASONIC CORP 发明人 TAKAHASHI MASAO
分类号 H01L21/66;H01L21/3205;H01L21/60;H01L23/52 主分类号 H01L21/66
代理机构 代理人
主权项
地址