| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lamination press technique that can reduce the rest time of press operation through configuration of reducing a membrane replacing time. <P>SOLUTION: In the closed state, a lower press table 1 and an upper press table 1 form a vacuum chamber 7 utilizing a peripheral seals 6. A flexible membrane 8 divides the vacuum chamber into a product half chamber 9 that is provided for storing a workpiece and that can be evacuated and a pressure half chamber 10 that can be pressurized. The membrane is constructed and arranged so that it presses the workpiece against a bottom side of the vacuum chamber due to a pressure difference of the product half chamber and the pressure half chamber. The membrane is mounted on a membrane frame 2, and this membrane frame 2 can be detachably connected to the upper press table and that can be handled separately. A membrane frame magazine is installed in which a membrane frame with a membrane attached is stored in a state ready to be used as a replacement frame. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
