| 摘要 |
PROBLEM TO BE SOLVED: To enlarge a measuring range of an image correlation displacement gage. SOLUTION: This image correlation displacement gage equipped with an illumination means (a laser 20, a collimator lens 22) of coherent light (floodlighting beam 24), for measuring in-plane displacement of a measuring object (work 10) from correlation between an acquired image A of a speckle pattern acquired by illumination of the coherent light and a reference image R, is also equipped with a means (reference image storage part 36) for storing a plurality of reference images R, and a means (correlation processing part 38) for taking correlation with the acquired image A by using one of the plurality of reference images R. COPYRIGHT: (C)2010,JPO&INPIT
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