发明名称 MEDICINAL SOLUTION RECEIVING MEMBER, AND APPARATUS AND METHOD FOR COLLECTING MEDICINAL SOLUTION
摘要 PROBLEM TO BE SOLVED: To provide a medicinal solution collecting apparatus and a medicinal solution collecting method capable of efficiently segregating and collecting the used medical solution consisting of medical solution favorable for reproduction and medical solution not suitable for reproduction due to mixing of cleaning liquid by a simple device constitution. SOLUTION: The medicinal solution collecting apparatus 21 comprises a medicinal solution receiving member 1 having a medicinal solution inlet in which the medicinal solution flows, a medicinal solution storage part for storing the medicinal solution of the predetermined amount flown in from the medicinal solution inlet, and a medicinal solution outlet for discharging the medicinal solution of the amount exceeding the predetermined value of the medicinal solution storage part, a medicinal solution collection pump 23 for sucking the collected medicinal solution stored in the medicinal solution storage part, a collection tank 24 for storing the stored medicinal solution sucked by the medicinal solution collection pump, and a disposal tank 25 for storing the disposed medicinal solution discharged from the medicinal solution port. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009285819(A) 申请公布日期 2009.12.10
申请号 JP20080143828 申请日期 2008.05.30
申请人 NOMURA MICRO SCI CO LTD 发明人 TAKAHASHI TAKUYA;SAKUMA KOICHI;HORI TORU;IIYAMA MASAMITSU
分类号 B24B57/02;H01L21/304 主分类号 B24B57/02
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