发明名称 METHOD AND REACTOR FOR GROWING CRYSTALS
摘要 The reactor for growing crystals on substrates comprises a reaction chamber, support for at least one seed, inlet means for at least one reaction gas, inlet for combustion gasses and means for triggering combustion between said combustion gasses. The growth of a crystal on a seed located inside the reaction chamber comprises the steps of introducing at least one reaction gas into the reaction chamber, introducing combustion gasses into the reaction chamber, triggering combustion between the combustion gasses and depositing the material so generated on the seed.
申请公布号 US2009305484(A1) 申请公布日期 2009.12.10
申请号 US20060995314 申请日期 2006.07.10
申请人 MASI MAURIZO 发明人 MASI MAURIZO
分类号 H01L21/365;C23C16/448 主分类号 H01L21/365
代理机构 代理人
主权项
地址