| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect position variation (drift) generated after being stopped at a target position of a stage. SOLUTION: A device for detecting the position variation of the relatively movable stage for a fixed body includes: a detection capacitor part composed to have a detection fixed electrode provided on the fixed body and a detection moving electrode provided on the stage, and varying an electrical capacity of each electrode together with movement of the stage; a reference capacitor part composed to have a reference fixed electrode provided on the fixed body and a reference moving electrode provided on the stage, and making an electrical capacity of each electrode substantially constant during movement of the stage; and a power source for applying voltage on both of the detection capacitor part and the reference capacitor part. The voltage applied from the power source is controlled in response to variation of the electrical capacity of the reference capacitor part. COPYRIGHT: (C)2010,JPO&INPIT |
