SURFACE INSPECTION DEVICE AND SURFACE INSPECTION METHOD

摘要

<P>PROBLEM TO BE SOLVED: To provide a surface inspection device which reduces the dispersion light from outside the measurement visual field irrespective of the size of the measurement visual field. Ž<P>SOLUTION: This surface inspection device comprises: a light irradiation part 450 irradiating the surface of a wafer 1 which is an inspection object with a light beam 458; a wafer drive means 470 which makes the light beam 458 from the light irradiation part 450 scan on the surface of the wafer 1 by driving the wafer 1; a light receiving element 463 of light detectors 460a, 460b which detect the dispersion light 459 from the wafer 1; and a visual field diaphragm 462 which changes the penetration range of the dispersion light reaching the light receiving element 463. A controller 510 controls the light diameter of the light beam 458 and the penetration range of the visual field diaphragm 462 by matching them. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž