| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical sprayer and an apparatus for treating a substrate, which contains the chemical sprayer. Ž<P>SOLUTION: The chemical sprayer comprises a first spraying piping 510, a second spraying piping 520, and a driving part 530. The first and the second spraying pipings are arranged on the same line, having many first and second spraying nozzles for spraying a chemical to a substrate. The driving part provides driving force to end portions of the first and second pipings that are adjacent to each other, so as to cause the first and the second spraying nozzles to swing between the first and the second spraying pipings 510 and 520. Hence, stable swinging of the first and the second spraying nozzles formed on the first and the second spraying pipings is possible. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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