APPARATUS FOR MANUFACTURING THIN FILM SOLAR CELL

摘要

An apparatus for manufacturing a thin film solar cell has a film-forming chamber wherein a substrate is arranged such that a film-forming surface of the substrate is substantially parallel to the gravity direction and a film is formed on the film-forming surface by a CVD method; an electrode unit having a cathode unit wherein cathodes to which voltages are to be applied are arranged on the both sides, and a pair of anodes which are arranged to face the cathodes, respectively, at a distance therefrom; and a transfer section, which supports the substrate and transfers the substrate between the cathode and the anode facing the cathode.  The distance between the anodes and the cathodes can be varied.